VARIAN 350D & XP Series
Ion Implant Systems
The Varian implant systems are proven platforms with a wide range of processes utilized by a large global install base. More than a production tool, the Varian systems will be an implant contributor to your production line for years to come.
Varian 350D and XP Series
Ion Implant Systems
SHELLBACK owns all IP and product stewardship for the following Varian Sunset Products:
- Mid Current: 350D, 350 DE
- High Current: 80XP, 120XP, 160XP
- High Frequency: G1500, G1510
Applications
- Power Device
- Memory
- Logic
- Analog
- Discrete
- MEMS
Features:
- Mid-current implanter
- Single-wafer / Single-end Station
- Vertical wafer handling
- Photoresist process capability
- Max beam currents: 1.5 mA
- Wafer Sizes: 100mm, 125mm, and 150mm
Benefits:
- Optimized for maximum dose uniformity and repeatability
- Reduced particulate contamination
- Production-proven solution
- Industry lowest CoO
- High Throughput