SEMITOOL
HF Vapor Tool
HFV
The SEMITOOL HF Vapor platform delivers SHELLBACK patented HF Vapor process. The on-axis, HDPE, process chamber can accommodate up to 25 wafers in a vertical orientation.
SEMITOOL HF Vapor Tool (HFV)
Batch Spray System
Process Applications:
- Spring release
- Selective oxide etch
- Hydrophobic termination
Stiction-Free MEMS Spring Release Process
Features:
Chamber
- Enhanced Spray Technology
- On-Axis design
- Atmosphere process
- Uniform and stable etch rate
- MFC flow control
- HDPE process chamber
- Single chamber 25 wafer
- Safe operation
Cost of Ownership
- Low exhaust and facilities requirements
- Low chemical consumption
- Low DIW consumption
- Low waste
Software
- Windows 10
- Web based HMI
- Recipe Editor: Excel View & Remote upload
- SEC/GEM
- Smart Parts: Advanced predictive analytics