SEMITOOL Storm
Centrifugal Spray Cleaning System
the industry's first & best
Centrifugal Batch Spray Cleaning System
for Boxes, Cassettes, FOUPs and SMIF Pods.
SEMITOOL STORM, the industry’s first batch centrifugal spray cleaning tool, sets the standard cleaning & drying boxes, cassettes, FOUPs and SMIF Pods. Acquired in 2011, SHELLBACK manufactures the SEMITOOL STORM high capacity cleaning system for FOUPS, cassette boxes or carriers with sizes up to 300mm.
SEMITOOL STORM Centrifugal Spray Cleaning Tool
Batch Spray System
300mm and below
Features:
- Rotates the product through a DI water spray delivered on both the front and the back for complete coverage
- Rotation can be reversed to ensure full spray penetration of product
- Drying is accomplished with centrifugal acceleration coupled with ULPA filtered and heated air
- Optional surfactant delivery system can enhance cleaning efficiency
- Additional door option adds access from two sides
- Electropolished stainless steel chamber and rotor
- Eight PEEK DI spray manifolds with multiple PVDF nozzles
- Eight stainless steel CDA/N2 spray manifold with multiple PVDF nozzles
- Wetted DI line materials: Teflon®, PVDF, PEEK
- Anti-static system for drying cycle
- Brushless DC motor for reliable operation, braking, and positioning of rotor
- PLC control system with Window 10 OS
